Large Batch ALD

Large batch ALD engineered for strict coating uniformity and optimized load/unload cycles

Chamber Volume 70-1'000L

3D parts

With the new patent-pending chamber from Swiss Cluster. The innovative and scalable chamber has been optimally designed to adapt to all types of 3D parts and coating material to deliver exceptional coating homogeneity at unparalleled process speeds.

2.5x faster

The SC Optima has been carefully optimised to deliver high-quality and uniform coatings to all types of 3D objects in record time, streamlining every step of your door-to door processes, from loading to unloading.

Download SC Optima Spec Sheet

Technical Specifications.

Chamber Dimensions

Adapted to your 3D parts and coating material
70 L – 1000 L
640×640×640 mm – 900×1600×700 mm

Loading

Front loading with guided cart
Custom-made frame holders for 3D parts
Cleanroom compatible
Glovebox compatible

Process Temperatures

Up to 500°C

Precursors

Up to 8 gas sources with 6 individual inlets
Ozone option

Standard Materials

Al₂O₃, ZnO, SiO₂, TiO₂, Y₂O₃, Nitrides
Novel bubbler delivery system optimised for low vapour pressure precursors
500 nm Al₂O₃ < 1% 1-sigma uniformity

Substrate Sizes

Multiple substrates or 3D objects of various shapes and sizes
Dimensions of chamber and holder are optimally adapted to the parts and coating material

Interfacing

Possible to interface with MES systems or other interfaces

Configure Your Architecture

Every system is tailored to specific deposition requirements. Contact our engineering team to review your process parameters and define the exact hardware configuration for your lab.

Discuss System Configuration