A Batch ALD System for R&D and Small-Scale Production
The SC Qube is an ALD batch system for R & D and small scale production to coat different kinds and sizes of 3D parts.
The patent-pending scalable chamber from Swiss Cluster can be configured to fit to all types of 3D parts and coating material requirements to deliver exceptional coating homogeneity at unparalleled process speeds.
Our single chamber approach makes it easy to configure the chamber, integrate to a cleanroom or to a glovebox unit with an easy front loading of 3D parts with custom-made holders.
|Adapted to your 3D parts and coating material
3 L – 50L
150x150x150mm – 370x370x370mm
|Front loading with guided door
Custom-made frame holders for 3D parts
|Up to 500°C
|Up to 8 gas sources with 6 individual inlets
|Al₂O₃, ZnO, SiO₂, TiO₂, Y₂O₃, Nitrides
Novel bubbler delivery system optimised for low vapour pressure precursors
500 nm Al₂O₃ < 1% 1-sigma uniformity
|Multiple substrates or 3D objects of various shapes and sizes
Dimensions of chamber and holder are optimally adapted to the parts and coating material
The SC Qube can be customised to meet your material and process requirements. Contact us for quotations or any other inquiries.